No. | Items | Standard Specification | |||||
1 | Size | 2″ | 3″ | 4″ | 6″ | 8″ | 12″ |
2 | Diameter mm | 50.8±0.3 | 76.2±0.3 | 100±0.5 | 150±0.5 | 200±0.5 | 300±0.5 |
3 | Conductivity | P or N or un-doped | |||||
4 | Orientation | <100>, <110>, <111> | |||||
5 | Thickness μm | 279, 381, 425, 525, 575, 625, 675, 725 or as required | |||||
6 | Resistivity Ω-cm | ≤0.005, 0.005-1, 1-10, 10-20, 20-100, 100-300 etc | |||||
7 | RRV max | 8%, 10%, 12% | |||||
8 | Primary Flat/Length mm | As SEMI standard or as required | |||||
9 | Secondary Flat/Length mm | As SEMI standard or as required | |||||
10 | TTV μm max | 10 | 10 | 10 | 10 | 10 | 10 |
11 | Bow & Warp μm max | 30 | 30 | 30 | 30 | 30 | 30 |
12 | Surface Finish | As-cut, L/L, P/E, P/P | |||||
13 | Packing | Foam box or cassette inside, carton box outside. |
Symbol | Si |
Atomic Number | 14 |
Atomic Weight | 28.09 |
Element Category | Metalloid |
Group, Period, Block | 14, 3, P |
Crystal structure | Diamond |
Color | Dark gray |
Melting Point | 1414°C, 2577.2°F, 1687.15 K |
Boiling Point | 3265°C, 5909°F, 3538.15 K |
Density at 300K | 2.329 g/cm3 |
Intrinsic resistivity | 3.2E5 Ω-cm |
CAS Number | 7440-21-3 |
EC Number | 231-130-8 |