No. |
Items |
Standard Specification |
1 |
Size |
2″ |
3″ |
4″ |
6″ |
8″ |
12″ |
2 |
Diameter mm |
50.8±0.3 |
76.2±0.3 |
100±0.5 |
150±0.5 |
200±0.5 |
300±0.5 |
3 |
Conductivity |
P or N or un-doped |
4 |
Orientation |
<100>, <110>, <111> |
5 |
Thickness μm |
279, 381, 425, 525, 575, 625, 675, 725 or as required |
6 |
Resistivity Ω-cm |
≤0.005, 0.005-1, 1-10, 10-20, 20-100, 100-300 etc |
7 |
RRV max |
8%, 10%, 12% |
8 |
Primary Flat/Length mm |
As SEMI standard or as required |
9 |
Secondary Flat/Length mm |
As SEMI standard or as required |
10 |
TTV μm max |
10 |
10 |
10 |
10 |
10 |
10 |
11 |
Bow & Warp μm max |
30 |
30 |
30 |
30 |
30 |
30 |
12 |
Surface Finish |
As-cut, L/L, P/E, P/P |
13 |
Packing |
Foam box or cassette inside, carton box outside. |