No. | Items | Standard Specification | ||
1 | Diameter mm | 50.8±0.05 | 100±0.1 | 150±0.2 |
2 | Growth Method | HEM | HEM | HEM |
3 | Orientation | (C-A) or (C-M) | (C-A) or (C-M) | (C-A) or (C-M) |
4 | Primary Flat Location | A-axis ±0.2° | A-axis ±0.2° | A-axis ±0.2° |
5 | Primary Flat Length mm | 16±0.5 | 30±0.5 | 47.5±0.5 |
6 | Thickness μm | 430±10 | 650±20 | 1300±20 |
7 | TTV μm max | 5 | 10 | 15 |
8 | Bow μm max | 5 | 10 | 15 |
9 | Warp μm max | 8 | 15 | 30 |
10 | Surface Finish | P/E | P/E | P/E |
11 | Surface Roughness nm | <0.2 (epi-ready, for polished surface) | ||
12 | Packing | In Nitrogen filled atmosphere vacuum bag. | ||
14 | Remarks | Ingot/bulk up to 8″ is also available upon request. |
Linear Formula | Al2O3 |
Molecular Weight | 101.96 |
Crystal structure | Hexagonal |
Apperance | Translucent solid |
Melting Point | 2050 °C, 3720 °F |
Boiling Point | 2977 °C, 5391 °F |
Density at 300K | 4.0 g/cm3 |
Energy Gap | N/A |
Intrinsic resistivity | 1E16 Ω-cm |
CAS Number | 1344-28-1 |
EC Number | N/A |