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New Delivery for Site Flatness - Gallium Nitride GaN – WMC

Phosphorus is reddish brown amorphous with metallic luster solid material and in two state of red phosphorus and white phosphorus. Red phosphorus, sublimation at 4160C, can be steamed into white phosphorus after cooling, It can also burn with oxygen to form phosphorus pentoxides, and easily generate three and five phosphorus halides When reacting with halogen compounds

High purity Phosphorus of 99.999% and 99, 9999% 5N 6N is mainly used for the production of III-V compound semiconductors such as Indium Phosphide InP, Gallium Phosphide GaP etc, and also be used as the doped element of N-type single crystal silicon and germanium growth etc.

 


Details

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No. Items Standard Specification
1 Shape Circular Circular Square
2 Size 2″ 4″
3 Diameter mm 50.8±0.5 100±0.5
4 Side Length mm 10×10 or 10×5
5 Growth Method HVPE HVPE HVPE
6 Orientation C-plane (0001) C-plane (0001) C-plane (0001)
7 Conductivity Type N/(Si-doped or un-doped), Semi-insulating
8 Resistivity Ω-cm <0.1, <0.05, >1E6
9 Thickness μm 350±25 350±25 350±25
10 TTV μm max 15 15 15
11 Bow μm max 20 20 20
12 EPD cm-2 <5E8 <5E8 <5E8
13 Surface Finish P/E, P/P P/E, P/P P/E, P/P
14 Surface Roughness Front: ≤0.2nm, Back: 0.5-1.5μm or ≤0.2nm
15 Packing Single wafer container sealed in Aluminum bag.
Linear Formula GaN
Molecular Weight 83.73
Crystal structure Zinc blende or Wurtzite
Apperance Translucent solid
Melting Point 2500 °C
Boiling Point N/A
Density at 300K 6.15 g/cm3
Energy Gap (3.2-3.29) eV at 300K
Intrinsic resistivity >1E8 Ω-cm
CAS Number 25617-97-4
EC Number 247-129-0
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