Quality Inspection for Gallium Arsenide Substrates - CZ Silicon Wafer – WMC

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No.	Items	Standard Specification
1	Size	2″	3″	4″	6″	8″	12″
2	Diameter mm	50.8±0.3	76.2±0.3	100±0.5	150±0.5	200±0.5	300±0.5
3	Conductivity	P or N or un-doped
4	Orientation	<100>, <110>, <111>
5	Thickness μm	279, 381, 425, 525, 575, 625, 675, 725 or as required
6	Resistivity Ω-cm	≤0.005, 0.005-1, 1-10, 10-20, 20-100, 100-300 etc
7	RRV max	8%, 10%, 12%
8	Primary Flat/Length mm	As SEMI standard or as required
9	Secondary Flat/Length mm	As SEMI standard or as required
10	TTV μm max	10	10	10	10	10	10
11	Bow & Warp μm max	30	30	30	30	30	30
12	Surface Finish	As-cut, L/L, P/E, P/P
13	Packing	Foam box or cassette inside, carton box outside.

Symbol	Si
Atomic Number	14
Atomic Weight	28.09
Element Category	Metalloid
Group, Period, Block	14, 3, P
Crystal structure	Diamond
Color	Dark gray
Melting Point	1414°C, 2577.2°F, 1687.15 K
Boiling Point	3265°C, 5909°F, 3538.15 K
Density at 300K	2.329 g/cm³
Intrinsic resistivity	3.2E5 Ω-cm
CAS Number	7440-21-3
EC Number	231-130-8

CZ or MCZ Single Crystal Silicon Wafer n-type and p-type conductivity at Western Minmetals (SC) Corporation can be delivered in size of 2, 3, 4, 6, 8 and 12 inch diameter (50, 75, 100, 125, 150, 200 and 300mm), orientation <100>, <110>, <111> with surface finish of as-cut, lapped, etched and polished in package of foam box or cassette with carton box outside.